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ZJ-2 high vacuum ionization gauges |
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ZJ-2 high vacuum hot cathode ionization gauges This type of regulation is a typical transistor structure, with the feature of stable and reliable, also widely used in vacuum coating machine.
Main technical parameters: 1. Measurement range: 1 × 10-1 ~ 1 × 10-5Pa 2. X-ray limit: 1.6 × 10-6Pa 3. Regulate sensitivity: 0.15 ± 15% Pa-1 4. Operating parameters: Filament voltage 3.5V Filament current 1.2A Gate current (emission current) 5mA 5. Joule (I2R) degassing Gate voltage 12V Gate current 3.2A 6. Vacuum connections form and baking temperature: Φ15.5 ± 0.5 glass tube 80 ℃ CF35 ultrahigh flange 450 ℃ KF40 quick release flange 120 ℃ |
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